Wan D S, Lin D T
Appl Opt. 1993 Mar 1;32(7):1060-4. doi: 10.1364/AO.32.001060.
We introduce an interferometric method for measuring the profiles of cylindrical surfaces. A Fizeau interferometer with a flat reference is used to test part of a cylindrical surface, and various parts of the surface can be tested by the rotation of the surface. The algorithm for linking separate measurements is described, and testing examples for measuring sagitta over 3 mm of a cylindrical surface with an elliptical cross section are included. Measurement results show that repeatability for the above test to the order of 1 microm, is feasible.
我们介绍一种用于测量圆柱面轮廓的干涉测量方法。使用带有平面参考的斐索干涉仪来测试圆柱面的一部分，通过表面的旋转可以测试表面的不同部分。描述了用于连接单独测量的算法，并包括了测量具有椭圆形横截面的圆柱面矢高超过3毫米的测试示例。测量结果表明，上述测试的重复性达到1微米量级是可行的。
