Jalkanen Tero, Salonen Jarno, Torres-Costa Vicente, Fukami Kazuhiro, Sakka Tetsuo, Ogata Yukio H
Institute of Advanced Energy, Kyoto University, Uji, Kyoto, Japan.
Opt Express. 2011 Jul 4;19(14):13291-305. doi: 10.1364/OE.19.013291.
Different designs for producing multiple stopband mesoporous silicon rugate filters via electrochemical anodization are compared. The effects of light absorption and dispersion to visible range filter design are investigated. Thermal oxidation is applied for passivating the chemically reactive porous silicon surface, and the response of the passivated structures to ethanol vapor is examined. Differences in gas sensing properties for the various designs are evaluated and possible reasons for the observed differences are discussed. Methods for sidelobe suppression in multipeak filters are discussed and demonstrated, and their effects in gas sensing applications are estimated.
比较了通过电化学阳极氧化制备多阻带介孔硅波纹滤波器的不同设计。研究了光吸收和色散对可见光范围滤波器设计的影响。采用热氧化对化学反应性多孔硅表面进行钝化，并研究了钝化结构对乙醇蒸汽的响应。评估了各种设计在气敏特性方面的差异，并讨论了观察到这些差异的可能原因。讨论并展示了多峰滤波器中旁瓣抑制的方法，并估计了它们在气敏应用中的效果。
