Department of Mechanical Engineering, University of Minnesota, Minneapolis, MN 55455, USA.
Nanotechnology. 2008 Jun 18;19(24):245603. doi: 10.1088/0957-4484/19/24/245603. Epub 2008 May 9.
A novel dual-plasma system has been developed to combine the synthesis of silicon nanocrystals (Si-NCs), the etching to controllably tailor the Si-NC size, and the surface functionalization of Si-NCs into one simple all-gas-phase process. Si-NCs are synthesized in SiH(4)-based plasma; they then travel through CF(4)-based plasma, where Si-NCs are etched and passivated by C and F. The resulting Si-NCs exhibit air-stable emission across the full visible spectrum. Structural and optical characterization indicates that the emission in the red-to-green range is based on the recombination of quantum-confined excitons in Si-NCs, while the blue emission originates from defect states. The quantum yields of stabilized photoluminescence from Si-NCs range from 16% at the red end to 1% at the blue end.
一种新型的双等离子体系统已经被开发出来，将硅纳米晶体（Si-NCs）的合成、对 Si-NC 尺寸的可控刻蚀以及 Si-NCs 的表面功能化整合到一个简单的全气相工艺中。Si-NCs 是在 SiH(4)基等离子体中合成的；然后它们穿过 CF(4)基等离子体，在那里 Si-NCs 被 C 和 F 刻蚀和钝化。得到的 Si-NCs 表现出横跨整个可见光谱的空气稳定发射。结构和光学特性表明，红色到绿色范围的发射基于 Si-NCs 中量子限制激子的复合，而蓝色发射则源于缺陷态。稳定的 Si-NCs 光致发光的量子产率从红色端的 16%到蓝色端的 1%不等。
