Zeng Hongjun, Lajos Robert, Elzy Ed, Metlushko Vitali
Department of Electrical and Computer Engineering, University of Illinois at Chicago, Chicago, IL 60607, USA.
Nanotechnology. 2008 Jul 9;19(27):275307. doi: 10.1088/0957-4484/19/27/275307. Epub 2008 May 27.
We provide a 'growing' method for fabricating a microlens array with lateral size of a few microns or less. Instead of using complicated etching techniques, the method forms a spherical profile of the lens using conformal chemical vapor deposition. We have fabricated two lens arrays. One has a pitch of 1200 nm, a circular aperture 1000 nm in diameter and a sag height of 130 nm. The other array has a pitch of 600 nm, and a square aperture of 600 nm × 600 nm, with a fill factor close to 100%. The maximum profile deviation between the fabricated lens and an ideal sphere is about 11% and 14% respectively. The calculation indicates that the curvature difference of the profile of the square lens in the orthogonal and diagonal direction is 5.5%. The roughness of the lens is measured as approximately 6 nm.
我们提供了一种“生长”方法来制造横向尺寸为几微米或更小的微透镜阵列。该方法不使用复杂的蚀刻技术，而是通过保形化学气相沉积形成透镜的球形轮廓。我们已经制造了两个透镜阵列。一个的间距为1200纳米，圆形孔径直径为1000纳米，垂度高度为130纳米。另一个阵列的间距为600纳米，方形孔径为600纳米×600纳米，填充因子接近100%。制造的透镜与理想球体之间的最大轮廓偏差分别约为11%和14%。计算表明，方形透镜轮廓在正交和对角线方向上的曲率差为5.5%。测量的透镜粗糙度约为6纳米。
