Kim Joondong, Shin Young-Hyun, Yun Ju-Hyung, Han Chang-Soo, Hyun Moon Seop, Anderson Wayne A
Nano-Mechanical Systems Research Center, Korea Institute of Machinery and Materials (KIMM), Daejeon 305343, Korea.
Nanotechnology. 2008 Dec 3;19(48):485713. doi: 10.1088/0957-4484/19/48/485713. Epub 2008 Nov 12.
An electric conductive Ni silicide nanowire (NiSi NW) embedding electric force microscopy (EFM) tip was fabricated by the dielectrophoretic method and was used to obtain electric information. Due to the geometric and electric excellence, the NiSi NW provides advantages in imaging and fabrication of the microscopy tip. A lead zirconate titanate (PZT) ferroelectric thin film was positively and negatively polarized, and the polarities were obtained by probing of the NiSi NW EFM tip to give distinctive charging information of the PZT film. Moreover, the NiSi NW EFM probing was adopted to achieve the electrical signal from the NW interconnect. The NiSi NW EFM probe confirmed the uniform electric-potential distribution through the NiSi NW interconnect with a small standard deviation. This demonstrates the feasibility of functional utilizations of the NiSi NW.
通过介电泳法制备了一种嵌入电场力显微镜（EFM）探针的导电硅化镍纳米线（NiSi NW），并用于获取电信息。由于其几何和电学优势，NiSi NW在显微镜探针的成像和制造方面具有优势。对锆钛酸铅（PZT）铁电薄膜进行了正向和负向极化，并通过NiSi NW EFM探针的探测获得了极性，以给出PZT薄膜独特的充电信息。此外，采用NiSi NW EFM探测来获取来自NW互连的电信号。NiSi NW EFM探针证实了通过NiSi NW互连的电位分布均匀，标准偏差较小。这证明了NiSi NW功能应用的可行性。
