Convergent-beam electron diffraction.

This paper reviews the convergent-beam electron diffraction (CBED) technique. Point- and space-group determination methods of ordinary crystals are described, along with an example of the determination method for Sr₃Ru₂O₇. The symmetry determination of one-dimensionally incommensurate crystals and quasicrystals is explained. The large-angle CBED technique, which is indispensable for lattice defect and lattice strain analysis, is also described. A real procedure for lattice strain analysis is provided, using an example of a multilayer Si₁-xGe(x)/Si material. A nanometer-scale crystal structure refinement method and charge density and crystal potential determination method by CBED are briefly described.