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利用软 X 射线实现块状和透明样品的高对比度磁和非磁样品电流显微镜。

High contrast magnetic and nonmagnetic sample current microscopy for bulk and transparent samples using soft X-rays.

机构信息

MPI for Metals Research, Department of Modern Magnetic Materials, Heisenbergstrasse 3, 70569 Stuttgart, Germany.

出版信息

Microsc Microanal. 2011 Oct;17(5):834-42. doi: 10.1017/S1431927611000560. Epub 2011 Aug 25.

Abstract

The soft X-ray energy range provides important detection capabilities for a wide range of material systems, e.g., the K-edge behavior of biological materials or magnetic contrast imaging at the L2,3- and M4,5-edges, respectively, using the X-ray magnetic circular dichroism effect. The need for thinned samples due to the short penetration depth of soft X-rays is a limiting factor for microscopic imaging in transmission microscopy. In contrast, the more surface sensitive photoelectron emission microscopy allows the X-ray microscopic investigation of nontransparent bulk samples, but only small magnetic fields and very smooth surfaces are possible. As both high magnetic fields as well as bulk samples are important for magnetic imaging, we present total electron yield (TEY) microscopy results using the total sample current detection performed at the new ultra high vacuum scanning microscope "MAXYMUS" at HZB/BESSY II. We compare synchronous measurements in TEY and transmission mode to demonstrate the capabilities of TEY microscopy. Pictures and spectra with high absorption contrast and three-dimensional-like edge enhancement are observed as known for scanning electron microscopy. This unveils details on smallest length scales of the surface morphology. Furthermore, surface sensitive in- and out-of-plane magnetic TEY measurements at nontransparent samples are shown.

摘要

软 X 射线能量范围为广泛的材料系统提供了重要的检测能力,例如,使用 X 射线磁圆二色效应分别在 K 边研究生物材料的行为或在 L2、3 和 M4、5 边进行磁共振对比成像。由于软 X 射线的穿透深度较短,因此需要对样品进行减薄,这是透射显微镜中微观成像的一个限制因素。相比之下,光电发射显微镜对非透明体样品的表面更敏感,但只能探测到较小的磁场和非常光滑的表面。由于高磁场和体样品对于磁成像都很重要,我们在 HZB/BESSY II 的新型超高真空扫描显微镜“MAXYMUS”上使用总样品电流检测,展示了总电子产额(TEY)显微镜的结果。我们比较了 TEY 和透射模式的同步测量,以证明 TEY 显微镜的能力。与众所周知的扫描电子显微镜一样,我们观察到具有高吸收对比度和三维边缘增强的图像和光谱。这揭示了表面形貌的最小长度尺度的细节。此外,还展示了对非透明样品的表面敏感的面内和面外磁 TEY 测量。

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