基于ZnO薄膜温度相关光学特性的光学温度传感器。

Optical temperature sensor based on ZnO thin film's temperature-dependent optical properties.

作者信息

Sui Chenghua, Xia Juan, Wang Helin, Xu Tianning, Yan Bo, Liu Yuling

机构信息

Department of Applied Physics, College of Science, Zhejiang University of Technology, Hangzhou, Zhejiang, China.

出版信息

Rev Sci Instrum. 2011 Aug;82(8):084901. doi: 10.1063/1.3616361.

DOI:10.1063/1.3616361

PMID:21895265

Abstract

A reflective fiber temperature sensor system based on the ZnO thin film is proposed. The transmittance spectra and temperature dependent optical property of the sensing head with ZnO thin film is investigated theoretically and experimentally, and the temperature resolution of ∼1 °C is obtained in the temperature region of 300-773 K. The temperature sensing system is only related to the wavelength shift of transmittance spectra, and has a high stability without depending on the incident light intensity. This research results also indicate a fiber optical sensor with a broad temperature measurement range (10-1800 K) can be gained as a promising temperature sensing device, and can be applied into some extremely environments, such as aircraft, nuclear power station and power transmission system, and so on.

摘要

提出了一种基于ZnO薄膜的反射式光纤温度传感器系统。对带有ZnO薄膜的传感头的透射光谱和与温度相关的光学特性进行了理论和实验研究，在300 - 773 K的温度范围内获得了约1°C的温度分辨率。该温度传感系统仅与透射光谱的波长偏移有关，且具有高稳定性，不依赖于入射光强度。该研究结果还表明，作为一种有前景的温度传感装置，可以获得一种温度测量范围宽（10 - 1800 K）的光纤传感器，并可应用于一些极端环境，如飞机、核电站和输电系统等。