Huang Hu, Zhao Hongwei, Mi Jie, Yang Jie, Wan Shunguang, Yang Zhaojun, Yan Jiwang, Ma Zhichao, Geng Chunyang
College of Mechanical Science & Engineering, Jilin University, Renmin Street 5988, Changchun, Jilin 130025, China.
Rev Sci Instrum. 2011 Sep;82(9):095101. doi: 10.1063/1.3632980.
Nanoindentation technology is developing toward the in situ test which requires miniaturization of indentation instruments. This paper presents a miniaturization nanoindentation device based on the modular idea. It mainly consists of macro-adjusting mechanism, x-y precise positioning platform, z axis precise driving unit, and the load-depth measuring unit. The device can be assembled with different forms and has minimum dimensions of 200 mm × 135 mm × 200 mm. The load resolution is about 0.1 mN and the displacement resolution is about 10 nm. A new calibration method named the reference-mapping method is proposed to calibrate the developed device. Output performance tests and indentation experiments indicate the feasibility of the developed device and calibration method. This paper gives an example that combining piezoelectric actuators with flexure hinge to realize nanoindentation tests. Integrating a smaller displacement sensor, a more compact nanoindentation device can be designed in the future.
纳米压痕技术正朝着原位测试方向发展，这就要求压痕仪器小型化。本文提出了一种基于模块化理念的小型化纳米压痕装置。它主要由宏观调节机构、x-y精密定位平台、z轴精密驱动单元和载荷-深度测量单元组成。该装置可以以不同形式组装，最小尺寸为200mm×135mm×200mm。载荷分辨率约为0.1mN，位移分辨率约为10nm。提出了一种名为参考映射法的新校准方法来校准所开发的装置。输出性能测试和压痕实验表明了所开发装置和校准方法的可行性。本文给出了一个将压电致动器与柔性铰链相结合以实现纳米压痕测试的例子。集成更小的位移传感器，未来可以设计出更紧凑的纳米压痕装置。
