Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, 76344, Eggenstein-Leopoldshafen, Germany.
Anal Bioanal Chem. 2012 May;403(3):643-50. doi: 10.1007/s00216-011-5435-z. Epub 2011 Oct 20.
The fabrication of novel iron-doped barium strontium titanate thin films by means of radio frequency (RF) magnetron co-sputtering is shown. Investigations of the elemental composition and the dopant distribution in the thin films obtained by X-ray photoelectron spectroscopy, Rutherford backscattering spectrometry, and time-of-flight secondary ion mass spectroscopy reveal a homogeneous dopant concentration throughout the thin film. The incorporation of the iron dopant and the temperature-dependent evolution of the crystal structure and morphology are analyzed by electron paramagnetic resonance spectroscopy, X-ray diffraction, Raman spectroscopy, atomic force microscopy, and scanning electron microscopy. In summary, these results emphasize the RF magnetron co-sputter process as a versatile way to fabricate doped thin films.
通过射频 (RF) 磁控共溅射方法制备了新型铁掺杂钡锶钛酸盐薄膜。通过 X 射线光电子能谱、卢瑟福背散射光谱和飞行时间二次离子质谱研究了所获得的薄膜的元素组成和掺杂剂分布，结果表明薄膜中的掺杂剂浓度是均匀的。电子顺磁共振光谱、X 射线衍射、拉曼光谱、原子力显微镜和扫描电子显微镜分析了铁掺杂剂的掺入以及晶体结构和形态随温度的演变。总之，这些结果强调了 RF 磁控共溅射工艺是一种制备掺杂薄膜的通用方法。
