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应用于绝对距离计量的超分数法:理论分析

Method of excess fractions with application to absolute distance metrology: theoretical analysis.

作者信息

Falaggis Konstantinos, Towers David P, Towers Catherine E

机构信息

School of Mechanical Engineering, University of Leeds, Leeds, UK.

出版信息

Appl Opt. 2011 Oct 1;50(28):5484-98. doi: 10.1364/AO.50.005484.

Abstract

The method of excess fractions (EF) is well established to resolve the fringe order ambiguity generated in interferometric detection. Despite this background, multiwavelength interferometric absolute long distance measurements have only been reported with varying degrees of success. In this paper we present a theoretical model that can predict the unambiguous measurement range in EF based on the selected measurement wavelengths and phase noise. It is shown that beat wavelength solutions are a subset of this theoretical model. The performance of EF, for a given phase noise, is shown to be equivalent to beat techniques but offers many alternative sets of measurement wavelengths and therefore EF offer significantly greater flexibility in experimental design.

摘要

多余分数(EF)方法已被充分确立,用于解决干涉测量检测中产生的条纹级次模糊问题。尽管有此背景,但多波长干涉绝对长距离测量的报道仅有不同程度的成功案例。在本文中,我们提出了一个理论模型,该模型可以根据选定的测量波长和相位噪声预测基于EF的明确测量范围。结果表明,拍频波长解是该理论模型的一个子集。对于给定的相位噪声,EF的性能被证明与拍频技术相当,但提供了许多可供选择的测量波长组,因此EF在实验设计中具有显著更大的灵活性。

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