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利用飞秒激光改进的色散干涉数据处理算法。

Improved Algorithms of Data Processing for Dispersive Interferometry Using a Femtosecond Laser.

机构信息

Precision Nanometrology Laboratory, Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan.

出版信息

Sensors (Basel). 2023 May 21;23(10):4953. doi: 10.3390/s23104953.

Abstract

Two algorithms of data processing are proposed to shorten the unmeasurable dead-zone close to the zero-position of measurement, i.e., the minimum working distance of a dispersive interferometer using a femtosecond laser, which is a critical issue in millimeter-order short-range absolute distance measurement. After demonstrating the limitation of the conventional data processing algorithm, the principles of the proposed algorithms, namely the spectral fringe algorithm and the combined algorithm that combines the spectral fringe algorithm with the excess fraction method, are presented, together with simulation results for demonstrating the possibility of the proposed algorithms for shortening the dead-zone with high accuracy. An experimental setup of a dispersive interferometer is also constructed for implementing the proposed data processing algorithms over spectral interference signals. Experimental results demonstrate that the dead-zone using the proposed algorithms can be as small as half of that of the conventional algorithm while measurement accuracy can be further improved using the combined algorithm.

摘要

提出了两种数据处理算法来缩短接近测量零位的不可测量死区,即使用飞秒激光的色散干涉仪的最小工作距离,这是毫米级短程绝对距离测量中的一个关键问题。在证明了传统数据处理算法的局限性之后,提出了所提出算法的原理,即光谱条纹算法和将光谱条纹算法与过剩分数法相结合的组合算法,并给出了模拟结果,以证明所提出算法具有高精度缩短死区的可能性。还构建了色散干涉仪的实验装置,以在光谱干涉信号上实现所提出的数据处理算法。实验结果表明,使用所提出的算法可以将死区缩小到传统算法的一半,而使用组合算法可以进一步提高测量精度。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b1b2/10222339/5677d3e43b86/sensors-23-04953-g001.jpg

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