Department of Systems Design Engineering, University of Waterloo, Waterloo, Ontario, Canada.
J Microsc. 2012 Feb;245(2):210-20. doi: 10.1111/j.1365-2818.2011.03563.x. Epub 2011 Nov 17.
This paper presents microelectromechanical system micromirrors with sidewall electrodes applied for use as a Confocal MACROscope for biomedical imaging. The MACROscope is a fluorescence and brightfield confocal laser scanning microscope with a very large field of view. In this paper, a microelectromechanical system mirror with sidewall electrodes replaces the galvo-scanner and XYZ-stage to improve the confocal MACROscope design and obtain an image. Two micromirror-based optical configurations are developed and tested to optimize the optical design through scanning angle, field of view and numerical aperture improvement. Meanwhile, the scanning frequency and control waveform of the micromirror are tested. Analysing the scan frequency and waveform becomes a key factor to optimize the micromirror-based confocal MACROscope. When the micromirror is integrated into the MACROscope and works at 40 Hz, the micromirror with open-loop control possesses good repeatability, so that the synchronization among the scanner, XYZ-stage and image acquisition can be realized. A laser scanning microscope system based on the micromirror with 2 μm width torsion bars was built and a 2D image was obtained as well. This work forms the experimental basis for building a practical confocal MACROscope.
本文提出了具有侧壁电极的微机电系统微镜，可用于作为生物医学成像的共焦 MACROscope。MACROscope 是一种具有非常大视场的荧光和明场共焦激光扫描显微镜。在本文中，采用具有侧壁电极的微机电系统反射镜代替振镜和 XYZ 台，以改进共焦 MACROscope 的设计并获取图像。开发并测试了两种基于微镜的光学配置，以通过扫描角、视场和数值孔径的改进来优化光学设计。同时，测试了微镜的扫描频率和控制波形。分析扫描频率和波形成为优化基于微镜的共焦 MACROscope 的关键因素。当微镜集成到 MACROscope 中并以 40 Hz 工作时，具有开环控制的微镜具有良好的重复性，从而可以实现扫描仪、XYZ 台和图像采集之间的同步。建立了基于宽度为 2μm 的扭转梁的微镜的激光扫描显微镜系统，并获得了二维图像。这项工作为构建实用的共焦 MACROscope 奠定了实验基础。
