Chen Huipeng, Li Mengyuan, Zhang Yi, Xie Huikai, Chen Chang, Peng Zhangming, Su Shaohui
School of Mechanical Engineering, HangZhou DianZi University, Hangzhou 310018, China.
Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611, USA.
Sensors (Basel). 2018 Feb 8;18(2):508. doi: 10.3390/s18020508.
Incorporating linear-scanning micro-electro-mechanical systems (MEMS) micromirrors into Fourier transform spectral acquisition systems can greatly reduce the size of the spectrometer equipment, making portable Fourier transform spectrometers (FTS) possible. How to minimize the tilting of the MEMS mirror plate during its large linear scan is a major problem in this application. In this work, an FTS system has been constructed based on a biaxial MEMS micromirror with a large-piston displacement of 180 μm, and a biaxial H∞ robust controller is designed. Compared with open-loop control and proportional-integral-derivative (PID) closed-loop control, H∞ robust control has good stability and robustness. The experimental results show that the stable scanning displacement reaches 110.9 μm under the H∞ robust control, and the tilting angle of the MEMS mirror plate in that full scanning range falls within ±0.0014°. Without control, the FTS system cannot generate meaningful spectra. In contrast, the FTS yields a clean spectrum with a full width at half maximum (FWHM) spectral linewidth of 96 cm under the H∞ robust control. Moreover, the FTS system can maintain good stability and robustness under various driving conditions.
将线性扫描微机电系统（MEMS）微镜集成到傅里叶变换光谱采集系统中，可以大大减小光谱仪设备的尺寸，使便携式傅里叶变换光谱仪（FTS）成为可能。如何在MEMS镜板的大幅线性扫描过程中使其倾斜最小化是该应用中的一个主要问题。在这项工作中，基于具有180μm大活塞位移的双轴MEMS微镜构建了一个FTS系统，并设计了一种双轴H∞鲁棒控制器。与开环控制和比例积分微分（PID）闭环控制相比，H∞鲁棒控制具有良好的稳定性和鲁棒性。实验结果表明，在H∞鲁棒控制下，稳定扫描位移达到110.9μm，MEMS镜板在整个扫描范围内的倾斜角在±0.0014°以内。没有控制时，FTS系统无法产生有意义的光谱。相比之下，在H∞鲁棒控制下，FTS产生的光谱干净，半高宽（FWHM）谱线宽度为96cm。此外，FTS系统在各种驱动条件下都能保持良好的稳定性和鲁棒性。
