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通过快速热化学气相沉积法生长的ZnO纳米结构的形态变化和结构特性

Morphological variations and structural properties of ZnO nanostructures grown by rapid thermal CVD.

作者信息

Kumar Ravi K, Husain M, Ansari Z A

机构信息

Department of Physics, Jamia Millia Islamia, Jamia Nagar New Delhi 110025, India.

出版信息

J Nanosci Nanotechnol. 2011 Aug;11(8):6940-5. doi: 10.1166/jnn.2011.4242.

DOI:10.1166/jnn.2011.4242
PMID:22103102
Abstract

Various nanostructures of ZnO such as nanowires, sea urchin like and nano needles were grown using rapid thermal chemical vapor deposition technique (RTCVD), in oxygen ambient. For the growth of such structures, oxygen pressure was kept as 0.1 Torr whereas the chamber base pressure was 10(-5) Torr. The growth temperature was varied from 600 degrees C to 850 degrees C, which resulted in morphological variations. X-ray diffraction measurement revealed the hexagonal wurtzite structure of ZnO preferably oriented in [001] direction, which was further confirmed by high-resolution transmission electron microscopic (HRTEM) observations. X-ray photoelectron spectroscopy (XPS) analysis suggests the presence of Zn 2p and O 1s. Raman E2 high peaks at approximately 434 cm(-1) has the highest intensity compared to other modes supports XRD results. Presence of low E2 peaks at approximately 330 cm(-1) indicates defects and oxygen vacancies.

摘要

在氧气环境中,采用快速热化学气相沉积技术(RTCVD)生长了各种氧化锌纳米结构,如纳米线、海胆状和纳米针状结构。为了生长这些结构,氧气压力保持在0.1托,而腔室基压为10⁻⁵托。生长温度在600℃至850℃之间变化,这导致了形态变化。X射线衍射测量表明氧化锌具有六方纤锌矿结构,且择优取向为[001]方向,高分辨率透射电子显微镜(HRTEM)观察进一步证实了这一点。X射线光电子能谱(XPS)分析表明存在锌2p和氧1s。与其他模式相比,拉曼E2在约434厘米⁻¹处的高峰强度最高,支持了XRD结果。在约330厘米⁻¹处存在低E2峰表明存在缺陷和氧空位。

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