Department of BioMedical Engineering, Cleveland Clinic, Cleveland, OH, USA.
Sensors (Basel). 2010;10(9):8740-50. doi: 10.3390/s100908740. Epub 2010 Sep 21.
Polyvinilidene fluoride (PVDF) single-element transducers for high-frequency (>30 MHz) ultrasound imaging applications have been developed using MEMS (Micro-electro-Mechanical Systems) compatible techniques. Performance of these transducers has been investigated by analyzing the sources and effects of on-chip parasitic capacitances on the insertion-loss of the transducers. Modeling and experimental studies showed that on-chip parasitic capacitances degraded the performance of the transducers and an improved method of fabrication was suggested and new devices were built. New devices developed with minimal parasitic effects were shown to improve the performance significantly. A 1-mm aperture PVDF device developed with minimal parasitic effects has resulted in a reduction of insertion loss of 21 dB compared with devices fabricated using a previous method.
采用微机电系统（MEMS）兼容技术，开发了用于高频（>30MHz）超声成像应用的聚偏二氟乙烯（PVDF）单元素换能器。通过分析片上寄生电容对换能器插入损耗的源和影响，研究了这些换能器的性能。建模和实验研究表明，片上寄生电容会降低换能器的性能，因此提出了一种改进的制造方法，并制造了新的器件。具有最小寄生效应的新型器件的开发显著提高了性能。与使用先前方法制造的器件相比，采用最小寄生效应开发的 1mm 孔径 PVDF 器件的插入损耗降低了 21dB。
