用于生物传感应用的微机械悬浮共面波导的温度特性研究。
Study of temperature characteristics of micromachined suspended coplanar waveguides for biosensing applications.
机构信息
Multidisciplinary Nanotechnology Centre, College of Engineering, Swansea University, Swansea, SA2 8PP, UK.
出版信息
Sensors (Basel). 2011;11(3):2640-51. doi: 10.3390/s110302640. Epub 2011 Mar 1.
In the recent development on biosensors, coplanar waveguide based microwave dielectric sensors have been attracting more and more attentions. In this paper, microwave performance of a suspended coplanar waveguide subject to temperature variations, particularly in a small range, is studied. The prototype is realized through a MEMS fabrication foundry. The thermal transfer analysis of the device is conducted using finite element method, and the microwave properties of the device are characterized. One of the results shows that at 20 GHz, the S11 has decreased by 7.4%, and S21 has increased by 3.5% when the voltage applied to the heaters varies from 9 V to 29 V.
在生物传感器的最新发展中，基于共面波导的微波介电传感器越来越受到关注。本文研究了温度变化，特别是小范围温度变化对悬空共面波导微波性能的影响。该原型通过 MEMS 制造工厂实现。使用有限元方法对器件的热传递进行了分析，并对器件的微波性能进行了表征。结果之一表明，当施加到加热器的电压从 9V 变化到 29V 时，在 20GHz 下，S11 减小了 7.4%，S21 增加了 3.5%。
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