Functionalization protocols of silicon micro/nano-mechanical biosensors.

Functionalization is a key element in biodetection technologies such as micro/nano-mechanical sensors. Since assay sensitivity and stability drastically depends on a proper bioreceptor immobilization, the sensing surface must be first chemically modified with uniform, well-packed, and robust layers. Here, we describe three functionalization protocols that we developed for the surface modification with amino, aldehyde, and carboxyl groups of micro/nano-mechanical biosensors.