Guo Wenjiang, Zhao Liping, Li Xiang, Chen I-Ming
Singapore Institute of Manufacturing Technology, 71 Nanyang Drive, 638075, Singapore.
Appl Opt. 2012 Jan 1;51(1):121-5. doi: 10.1364/AO.51.000121.
In the traditional Shack-Hartmann wavefront sensing (SHWS) system, a lenslet array with a bigger configuration is desired to achieve a higher lateral resolution. However, practical implementation limits the configuration and this parameter is contradicted with the measurement range. We have proposed a digital scanning technique by making use of the high flexibility of a spatial light modulator to sample the reflected wavefront [X. Li, L. P. Zhao, Z. P. Fang, and C. S. Tan, "Improve lateral resolution in wavefront sensing with digital scanning technique," in Asia-Pacific Conference of Transducers and Micro-Nano Technology (2006)]. The lenslet array pattern is programmed to laterally scan the whole aperture. In this paper, the methodology to optimize the scanning step for the purpose of form measurement is proposed. The correctness and effectiveness are demonstrated in numerical simulation and experimental investigation.
在传统的夏克-哈特曼波前传感（SHWS）系统中，需要更大配置的微透镜阵列来实现更高的横向分辨率。然而，实际应用限制了配置，并且该参数与测量范围相互矛盾。我们提出了一种数字扫描技术，利用空间光调制器的高灵活性来采样反射波前[X. Li, L. P. Zhao, Z. P. Fang, and C. S. Tan, “Improve lateral resolution in wavefront sensing with digital scanning technique,” in Asia-Pacific Conference of Transducers and Micro-Nano Technology (2006)]。微透镜阵列图案被编程为横向扫描整个孔径。本文提出了一种为形状测量优化扫描步长的方法。通过数值模拟和实验研究证明了其正确性和有效性。
