Takino Hideo, Yamamura Kazuya, Sano Yasuhisa, Mori Yuzo
Nikon Corporation, 1-10-1 Asamizodai, Sagamiharai, Kanagawa 228-0828, Japan.
Appl Opt. 2012 Jan 20;51(3):401-7. doi: 10.1364/AO.51.000401.
We propose a plasma chemical vaporization machining device with a hemispherical tip electrode for optical fabrication. Radio-frequency plasma is generated close to the electrode under atmospheric conditions, and a workpiece is scanned relative to the stationary electrode under three-axis motion control to remove target areas on a workpiece surface. Experimental results demonstrate that surface removal progresses although process gas is not forcibly supplied to the plasma. The correction of shape errors on conventionally polished spheres is performed. As a result, highly accurate smooth surfaces with the desired rms shape accuracy of 3 nm are successfully obtained, which confirms that the device is effective for the fabrication of optics.
我们提出了一种用于光学制造的具有半球形尖端电极的等离子体化学气相加工装置。在大气条件下，靠近电极产生射频等离子体，并且在三轴运动控制下相对于固定电极扫描工件，以去除工件表面上的目标区域。实验结果表明，尽管没有向等离子体强制供应工艺气体，但表面去除仍在进行。对传统抛光球体上的形状误差进行了校正。结果，成功获得了均方根形状精度为3 nm的高精度光滑表面，这证实了该装置对光学器件制造是有效的。
