Takino H, Shibata N, Itoh H, Kobayashi T, Tanaka H, Ebi M, Yamamura K, Sano Y, Mori Y
Appl Opt. 1998 Aug 1;37(22):5198-210. doi: 10.1364/ao.37.005198.
We have developed a chemical vaporization machining device that has computer numerically controlled plasma, by using a pipe electrode for optical fabrications. In this device, less than approximately 1 atm of pressure, plasma is generated around the tip of a pipe electrode. During the process, a workpiece is scanned against the electrode under computer control to achieve the desired shape to be removed. A workpiece of silica glass plate is shaped by use of this device, and the removal characteristics of the device are examined. The equations to characterize numerically the shape resulting from scanning of a workpiece have been derived. The new device allows the high precision of optics from the micrometer to the nanometer level with high-speed removal. The shaped surface is sufficiently smooth to be suitable for optical use.
我们开发了一种化学汽化加工设备，该设备通过使用用于光学制造的管状电极来实现计算机数控等离子体。在该设备中，在小于约1个大气压的压力下，在管状电极的尖端周围产生等离子体。在此过程中，工件在计算机控制下相对于电极进行扫描，以实现所需的去除形状。使用该设备对石英玻璃板工件进行成型，并研究该设备的去除特性。已经推导出了用于数值表征工件扫描后形状的方程。这种新设备能够以高速去除实现从微米级到纳米级的高精度光学加工。成型表面足够光滑，适合光学应用。
