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用于光学传感的双折射多孔硅膜

Birefringent porous silicon membranes for optical sensing.

作者信息

Alvarez Jesús, Bettotti Paolo, Suárez Isaac, Kumar Neeraj, Hill Daniel, Chirvony Vladimir, Pavesi Lorenzo, Martínez-Pastor Juan

机构信息

UMDO, Materials Science Institute, University of Valencia, Valencia, Spain.

出版信息

Opt Express. 2011 Dec 19;19(27):26106-16. doi: 10.1364/OE.19.026106.

Abstract

In this work anisotropic porous silicon is investigated as a material for optical sensing. Birefringence and sensitivity of the anisotropic porous silicon membranes are thoroughly studied in the framework of Bruggeman model which is extended to incorporate the influence of environment effects, such as silicon oxidation. The membranes were also characterized optically demonstrating sensitivity as high as 1245 nm/RIU at 1500 nm. This experimental value only agrees with the theory when it takes into consideration the effect of silicon oxidation. Furthermore we demonstrate that oxidized porous silicon membranes have optical parameters with long term stability. Finally, we developed a new model to determine the contribution of the main depolarization sources to the overall depolarization process, and how it influences the measured spectra and the resolution of birefringence measurements.

摘要

在这项工作中,研究了各向异性多孔硅作为一种光学传感材料。在扩展的布鲁格曼模型框架内,深入研究了各向异性多孔硅膜的双折射和灵敏度,该模型纳入了环境效应(如硅氧化)的影响。还对这些膜进行了光学表征,结果表明在1500nm处灵敏度高达1245nm/RIU。只有在考虑硅氧化效应时,这个实验值才与理论相符。此外,我们证明氧化多孔硅膜具有长期稳定的光学参数。最后,我们开发了一个新模型,以确定主要去极化源对整体去极化过程的贡献,以及它如何影响测量光谱和双折射测量的分辨率。

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