Caroselli Raffaele, Martín Sánchez David, Ponce Alcántara Salvador, Prats Quilez Francisco, Torrijos Morán Luis, García-Rupérez Jaime
Nanophotonics Technology Center (NTC), Universitat Politècnica de València, 46022 Valencia, Spain.
Sensors (Basel). 2017 Dec 5;17(12):2813. doi: 10.3390/s17122813.
Porous silicon seems to be an appropriate material platform for the development of high-sensitivity and low-cost optical sensors, as their porous nature increases the interaction with the target substances, and their fabrication process is very simple and inexpensive. In this paper, we present the experimental development of a porous silicon microcavity sensor and its use for real-time in-flow sensing application. A high-sensitivity configuration was designed and then fabricated, by electrochemically etching a silicon wafer. Refractive index sensing experiments were realized by flowing several dilutions with decreasing refractive indices, and measuring the spectral shift in real-time. The porous silicon microcavity sensor showed a very linear response over a wide refractive index range, with a sensitivity around 1000 nm/refractive index unit (RIU), which allowed us to directly detect refractive index variations in the 10 RIU range.
多孔硅似乎是开发高灵敏度、低成本光学传感器的合适材料平台，因为其多孔性质增强了与目标物质的相互作用，且其制造工艺非常简单且成本低廉。在本文中，我们展示了多孔硅微腔传感器的实验开发及其在实时流入传感应用中的使用。通过对硅片进行电化学蚀刻，设计并制造了一种高灵敏度配置。通过流动几种折射率逐渐降低的稀释液并实时测量光谱位移，实现了折射率传感实验。多孔硅微腔传感器在很宽的折射率范围内呈现出非常线性的响应，灵敏度约为1000纳米/折射率单位（RIU），这使我们能够直接检测10 RIU范围内的折射率变化。
