Najiminaini Mohamadreza, Vasefi Fartash, Kaminska Bozena, Carson Jeffrey J L
The School of Engineering Science, Simon Fraser University, Burnaby, BC, Canada.
Opt Express. 2011 Dec 19;19(27):26186-97. doi: 10.1364/OE.19.026186.
In this paper, we present a systematic study on the influence of composition of the adhesion layer between gold and a Pyrex substrate on the optical resonance transmission properties of nano-hole arrays in an optically thick gold film. Large nano-hole arrays with different hole periodicities in a square lattice arrangement were fabricated using Electron Beam Lithography using different adhesion layers (chromium, titanium, or etched adhesion layer). The fabricated nano-hole arrays were optically characterized using transmission spectroscopy. The optical performance of each nano-hole array was numerically simulated using a Finite Difference Time Domain (FDTD) method. The experiments and simulations revealed that the optical resonance transmission properties (i.e. the resonance wavelength, the spectral transmission modulation ratio, and the resonance bandwidth) of the nano-hole arrays depended highly on the composition and the thickness of the adhesion layer. The optical resonance bandwidths were larger for the nano-hole arrays with chromium or titanium adhesion layers. Also, a red-shift of the optical resonance peak was observed for nano-hole arrays with a metal adhesion layer compared to the corresponding nano-hole arrays with an etched adhesion layer, but the red-shift was greatest for the nano-hole array with the titanium adhesion layer. For adhesion layers of greater thickness, the optical resonance peaks were reduced in magnitude. Finally, nano-hole arrays with an etched adhesion layer had a significant blue-shift in the optical resonance peak and a narrower optical resonance bandwidth compared to nano-hole arrays with a titanium or a chromium adhesion layer. Consequently, a narrow optical resonance bandwidth characteristic of a nano-hole array with an etched adhesion layer can potentially enhance the spectral selectivity and offer improved optical performance.
在本文中，我们对金与派热克斯玻璃衬底之间粘附层的组成对光学厚金膜中纳米孔阵列的光学共振传输特性的影响进行了系统研究。使用电子束光刻技术，采用不同的粘附层（铬、钛或蚀刻粘附层）制备了具有不同孔间距的方形晶格排列的大型纳米孔阵列。使用透射光谱对制备的纳米孔阵列进行光学表征。使用时域有限差分（FDTD）方法对每个纳米孔阵列的光学性能进行了数值模拟。实验和模拟结果表明，纳米孔阵列的光学共振传输特性（即共振波长、光谱传输调制率和共振带宽）高度依赖于粘附层的组成和厚度。具有铬或钛粘附层的纳米孔阵列的光学共振带宽更大。此外，与具有蚀刻粘附层的相应纳米孔阵列相比，具有金属粘附层的纳米孔阵列观察到光学共振峰的红移，但对于具有钛粘附层的纳米孔阵列，红移最大。对于厚度更大的粘附层，光学共振峰的幅度减小。最后，与具有钛或铬粘附层的纳米孔阵列相比，具有蚀刻粘附层的纳米孔阵列在光学共振峰处有明显的蓝移，并且光学共振带宽更窄。因此，具有蚀刻粘附层的纳米孔阵列的窄光学共振带宽特性可能会提高光谱选择性并提供更好的光学性能。
