Department of Physics, University of Michigan, Ann Arbor, MI 48109, USA.
J Phys Condens Matter. 2012 Mar 7;24(9):095007. doi: 10.1088/0953-8984/24/9/095007. Epub 2012 Feb 3.
The atomic surface and interface structures of uncoated and metal-coated epi-polished ZnO(0001) Zn-polar wafers were investigated via surface x-ray diffraction. All uncoated samples showed the presence of a fully occupied (1 × 1) overlayer of oxygen atoms located at the on-top position above the terminating Zn atom, a structure predicted to be unstable by several density functional theory calculations. The same oxygen overlayer was clearly seen at the interface of ZnO with both elemental and oxidized metal Schottky contact layers. No significant atomic relaxations were observed at surfaces and interfaces processed under typical device fabrication conditions.
通过表面 X 射线衍射,研究了未经镀膜和金属镀膜的外延抛光 ZnO(0001)Zn 极性晶片的原子表面和界面结构。所有未经镀膜的样品均显示出完全占据的(1×1)氧原子覆盖层的存在,这些氧原子位于终止 Zn 原子之上的顶位,根据几种密度泛函理论计算,这种结构被预测为不稳定。在 ZnO 与元素和氧化金属肖特基接触层的界面处,也可以清楚地看到相同的氧覆盖层。在典型的器件制造条件下处理的表面和界面处,没有观察到明显的原子弛豫。