Nikolaev A G, Yushkov G Yu, Savkin K P, Oks E M
High Current Electronics Institute, Siberian Branch of the Russian Academy of Science, Tomsk 634055, Russia.
Rev Sci Instrum. 2012 Feb;83(2):02A503. doi: 10.1063/1.3663213.
This paper presents measurements of the angular distribution of the plasma components and different charge states of metal ions generated by a MEVVA-type ion source and measured by a time-of-flight mass-spectrometer. The experiments were performed for different cathode materials (Al, Cu, and Ti) and for different parameters of the vacuum arc discharge. The results are compared with prior results reported by other authors. The influence of different discharge parameters on the angular distribution in a vacuum arc source is discussed.
本文介绍了由MEVVA型离子源产生并由飞行时间质谱仪测量的等离子体成分和金属离子不同电荷态的角分布测量结果。针对不同的阴极材料（铝、铜和钛）以及真空电弧放电的不同参数进行了实验。将结果与其他作者先前报道的结果进行了比较。讨论了不同放电参数对真空电弧源中角分布的影响。
