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电极几何形状对封闭漂移型阳极层线性离子源离子束引出的影响。

Effects of electrode geometry on the ion beam extraction of closed drift type anode layer linear ion source.

作者信息

Lee Seunghun, Kim Jong-Kuk, Kim Do-Geun

机构信息

Korea Institute of Materials Science, Changwon, 642-831, Korea.

出版信息

Rev Sci Instrum. 2012 Feb;83(2):02B703. doi: 10.1063/1.3665961.

DOI:10.1063/1.3665961
PMID:22380308
Abstract

Closed drift type anode layer linear ion source was investigated with focusing on the electrode geometry effects on ion beam emission and anode layer formation. In the electrode geometry, the discharge gap between anode and cathode plays an important role to control anode layer formation as well as electron generation. When the discharge gap is increased from 2 to 3 mm, the ion current density was enhanced from 0.9 to 1.35 mA∕cm(2). Computational simulation by using an object oriented particle in cell showed that the discharge volume was extended due to enhanced electron generation and the electric field at the anode layer was enhanced from 1.32 to 1.52 MV∕cm.

摘要

对封闭漂移型阳极层线性离子源进行了研究,重点关注电极几何形状对离子束发射和阳极层形成的影响。在电极几何形状中,阳极与阴极之间的放电间隙在控制阳极层形成以及电子产生方面起着重要作用。当放电间隙从2毫米增加到3毫米时,离子电流密度从0.9毫安每平方厘米提高到1.35毫安每平方厘米。使用面向对象的粒子在单元格中的计算模拟表明,由于电子产生增强,放电体积得以扩展,并且阳极层处的电场从1.32兆伏每厘米增强到1.52兆伏每厘米。

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