Sakakita H, Kiyama S, Hirano Y, Koguchi H, Shimada T, Sato Y
Innovative Plasma Technologies Group, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba 305-8568, Japan.
Rev Sci Instrum. 2012 Feb;83(2):02B708. doi: 10.1063/1.3669795.
A low-energy ion beam system operating at a dc voltage of less than 300 V was developed using an ion source with a multicusp magnetic field. A high-current-density ion beam of 6.9 mA∕cm(2) was successfully extracted at the electrode. The beam extraction characteristics for flat and concave electrodes were compared. In the case of a concave electrode with a designed focal length of 350 mm, it was observed that the beam profile was sharper than that obtained using a flat electrode.
使用具有多尖峰磁场的离子源开发了一种在直流电压低于300 V下运行的低能离子束系统。在电极处成功提取了电流密度为6.9 mA∕cm²的高电流密度离子束。比较了平面电极和凹面电极的束流提取特性。在设计焦距为350 mm的凹面电极情况下，观察到束流轮廓比使用平面电极时更尖锐。
