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由丝引出电极形成的低能束流的离子能量分布函数。

Ion energy distribution functions of low energy beams formed by wire extraction electrodes.

作者信息

Tokumura S, Kasuya T, Vasquez M, Maeno S, Wada M

机构信息

Graduate School of Engineering, Doshisha University, Kyotanabe, Kyoto 610-321, Japan.

出版信息

Rev Sci Instrum. 2012 Feb;83(2):02B716. doi: 10.1063/1.3672475.

DOI:10.1063/1.3672475
PMID:22380321
Abstract

The two-electrode extractor system made of 0.1 mm diameter tungsten wires separated by 0.7 mm has formed an argon ion beam with 50 V extraction potential. Energy spreads of the extracted beams were typically less than 2 eV when the beam current density was low. The beam intensity rapidly decreased as the distance between the extractor and the beam detector increased, indicating space charge limited transport of the beam. Problems associated with the emittance measurements are also discussed.

摘要

由直径0.1毫米、间距0.7毫米的钨丝制成的双电极提取器系统,形成了具有50V提取电位的氩离子束。当束流密度较低时,提取束的能量分散通常小于2eV。随着提取器与束探测器之间距离的增加,束强度迅速下降,这表明束的空间电荷限制传输。还讨论了与发射度测量相关的问题。

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