Sasaki D, Ieki S, Kasuya T, Wada M
Graduate School of Engineering, Doshisha University, Kyoto 610-0321, Japan.
Rev Sci Instrum. 2012 Feb;83(2):02B715. doi: 10.1063/1.3672474.
A thin-walled aluminum (Al) hollow electrode has been inserted into an ion source to serve as an electrode for a radio frequency magnetron discharge. The produced plasma stabilized by argon (Ar) gas sputters the Al electrode to form a beam of Al(+) and Ar(+) ions. The total beam current extracted through a 3 mm diameter extraction hole has been 50 μA, with the Al(+) ion beam occupying 30% of the total beam current.
一个薄壁铝（Al）空心电极已被插入离子源，用作射频磁控管放电的电极。由氩气（Ar）稳定产生的等离子体溅射铝电极，形成铝离子（Al(+)）和氩离子（Ar(+)）束。通过直径为3毫米的引出孔引出的总束流为50微安，其中铝离子（Al(+)）束占总束流的30%。
