State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments and Mechanics, Tsinghua University, Beijing, 100084, China; E-Mails:
Sensors (Basel). 2009;9(9):6951-66. doi: 10.3390/s90906951. Epub 2009 Sep 2.
A novel design of a MEMS torsional resonant magnetometer based on Lorentz force is presented and fabricated. The magnetometer consists of a silicon resonator, torsional beam, excitation coil, capacitance plates and glass substrate. Working in a resonant condition, the sensor's vibration amplitude is converted into the sensing capacitance change, which reflects the outside magnetic flux-density. Based on the simulation, the key structure parameters are optimized and the air damping effect is estimated. The test results of the prototype are in accordance with the simulation results of the designed model. The resolution of the magnetometer can reach 30 nT. The test results indicate its sensitivity of more than 400 mV/μT when operating in a 10 Pa vacuum environment.
提出并制作了一种基于洛伦兹力的新型微机电系统（MEMS）扭转谐振磁强计。该磁强计由硅谐振器、扭转梁、激励线圈、电容板和玻璃衬底组成。在谐振状态下，传感器的振动幅度转换为感测电容的变化，反映外部磁通密度。基于仿真，优化了关键结构参数，并估算了空气阻尼效应。原型机的测试结果与设计模型的仿真结果一致。该磁强计的分辨率可达 30 nT。测试结果表明，在 10 Pa 真空环境下工作时，其灵敏度超过 400 mV/μT。
