用于费米@埃莱特拉自由电子激光束传输系统的极紫外多层膜。

Extreme ultraviolet multilayer for the FERMI@Elettra free electron laser beam transport system.

作者信息

Corso Alain Jody, Zuppella Paola, Windt David L, Zangrando Marco, Pelizzo Maria Guglielmina

机构信息

Consiglio Nazionale delle Ricerche-Institute for Photonics and Nanotechnologies, Laboratory for Ultraviolet and X-rays Optical Research, via Trasea 7, 35131 Padova, Italy.

出版信息

Opt Express. 2012 Mar 26;20(7):8006-14. doi: 10.1364/OE.20.008006.

DOI:10.1364/OE.20.008006

PMID:22453472

Abstract

In this work we present the design of a Pd/B₄C multilayer structure optimized for high reflectance at 6.67 nm. The structure has been deposited and also characterized along one year in order to investigate its temporal stability. This coating has been developed for the beam transport system of FERMI@Elettra Free Electron Laser: the use of an additional aperiodic capping layer on top of the structure combines the high reflectance with filter properties useful in rejecting the fundamental harmonic when the goal is to select the third FEL harmonic.

摘要

在这项工作中，我们展示了一种为在6.67纳米处实现高反射率而优化的钯/碳化硼多层结构的设计。该结构已被沉积，并经过了长达一年的表征，以研究其时间稳定性。这种涂层是为费米@埃莱特拉自由电子激光的光束传输系统开发的：在该结构顶部使用额外的非周期覆盖层，将高反射率与滤光特性相结合，当目标是选择第三级自由电子激光谐波时，有助于抑制基波谐波。