Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, GA 30332, USA.
Nanotechnology. 2012 Jun 1;23(21):215303. doi: 10.1088/0957-4484/23/21/215303. Epub 2012 May 3.
Scalable fabrication of carbon nanotube (CNT) bundles is essential to future advances in several applications. Here, we report on the development of a simple, two-step method for fabricating vertically aligned and periodically distributed CNT bundles and periodically porous CNT films at the sub-micron scale. The method involves laser interference ablation (LIA) of an iron film followed by CNT growth via iron-catalyzed chemical vapor deposition. CNT bundles with square widths ranging from 0.5 to 1.5 µm in width, and 50-200 µm in length, are grown atop the patterned catalyst over areas spanning 8 cm(2). The CNT bundles exhibit a high degree of control over square width, orientation, uniformity, and periodicity. This simple scalable method of producing well-placed and oriented CNT bundles demonstrates a high application potential for wafer-scale integration of CNT structures into various device applications, including IC interconnects, field emitters, sensors, batteries, and optoelectronics, etc.
可扩展地制造碳纳米管(CNT)束对于未来在多个应用领域的发展至关重要。在这里,我们报告了一种简单的两步法的发展,用于在亚微米尺度上制造垂直排列和周期性分布的 CNT 束和周期性多孔 CNT 薄膜。该方法涉及激光干涉烧蚀(LIA)铁膜,然后通过铁催化化学气相沉积生长 CNT。在面积为 8 cm(2)的范围内,在图案化催化剂上生长宽度为 0.5 至 1.5 µm,长度为 50-200 µm 的 CNT 束。 CNT 束在正方形宽度、取向、均匀性和周期性方面具有高度的控制。这种生产放置良好和取向 CNT 束的简单可扩展方法展示了在各种器件应用中,将 CNT 结构晶圆级集成到包括 IC 互连、场发射体、传感器、电池和光电等在内的应用中的巨大潜力。