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大面积排列纳米线和碳纳米管的吹泡薄膜。

Large-area blown bubble films of aligned nanowires and carbon nanotubes.

作者信息

Yu Guihua, Cao Anyuan, Lieber Charles M

机构信息

Department of Chemistry and Chemical Biology, Harvard University, Cambridge, Massachusetts 02138, USA.

出版信息

Nat Nanotechnol. 2007 Jun;2(6):372-7. doi: 10.1038/nnano.2007.150. Epub 2007 May 27.

Abstract

Many of the applications proposed for nanowires and carbon nanotubes require these components to be organized over large areas with controlled orientation and density. Although progress has been made with directed assembly and Langmuir-Blodgett approaches, it is unclear whether these techniques can be scaled to large wafers and non-rigid substrates. Here, we describe a general and scalable approach for large-area, uniformly aligned and controlled-density nanowire and nanotube films, which involves expanding a bubble from a homogeneous suspension of these materials. The blown-bubble films were transferred to single-crystal wafers of at least 200 mm in diameter, flexible plastics sheets of dimensions of at least 225 x 300 mm(2) and highly curved surfaces, and were also suspended across open frames. In addition, electrical measurements show that large arrays of nanowire field-effect transistors can be efficiently fabricated on the wafer scale. Given the potential of blown film extrusion to produce continuous films with widths exceeding 1 m, we believe that our approach could allow the unique properties of nanowires and nanotubes to be exploited in applications requiring large areas and relatively modest device densities.

摘要

许多针对纳米线和碳纳米管提出的应用要求这些组件在大面积上以可控的取向和密度进行排列。尽管在定向组装和朗缪尔-布洛杰特方法方面已经取得了进展,但尚不清楚这些技术能否扩展到大型晶圆和非刚性基板上。在此,我们描述了一种用于大面积、均匀排列且密度可控的纳米线和纳米管薄膜的通用且可扩展的方法,该方法涉及从这些材料的均匀悬浮液中吹出一个气泡。吹制的气泡薄膜被转移到直径至少为200毫米的单晶硅晶圆、尺寸至少为225×300毫米(2)的柔性塑料片以及高度弯曲的表面上,并且还横跨开放框架进行悬挂。此外,电学测量表明,可以在晶圆规模上高效地制造大型纳米线场效应晶体管阵列。鉴于吹塑薄膜挤出具有生产宽度超过1米的连续薄膜的潜力,我们相信我们的方法能够在需要大面积和相对适中器件密度的应用中利用纳米线和纳米管的独特性能。

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