Kwon Oh-Yun, Na Hyun-Jun, Kim Hyung-Jun, Lee Dong-Won, Nam Song-Min
Department of Electronic Materials Engineering, Kwangwoon University, 447-1, Wolgye-dong, Nowon-gu, Seoul, 139-701, South Korea.
Nanoscale Res Lett. 2012 May 22;7(1):261. doi: 10.1186/1556-276X-7-261.
Two types of ceramic-polymer composite thick films were deposited on Cu substrates by an aerosol deposition process, and their properties were investigated to fabricate optimized ceramic-based polymer composite thick films for application onto integrated substrates with the advantage of plasticity. When polymers with different mechanical properties, such as polyimide (PI) and poly(methyl methacrylate) (PMMA), are used as starting powders together with α-Al2O3 powder, two types of composite films are formed with different characteristics - surface morphologies, deposition rates, and crystallite size of α-Al2O3. Through the results of micro-Vickers hardness testing, it was confirmed that the mechanical properties of the polymer itself are associated with the performances of the ceramic-polymer composite films. To support and explain these results, the microstructures of the two types of polymer powders were observed after planetary milling and an additional modeling test was carried out. As a result, we could conclude that the PMMA powder is distorted by the impact of the Al2O3 powder, so that the resulting Al2O3-PMMA composite film had a very small amount of PMMA and a low deposition rate. In contrast, when using PI powder, the Al2O3-PI composite film had a high deposition rate due to the cracking of PI particles. Consequently, it was revealed that the mechanical properties of polymers have a considerable effect on the properties of the resulting ceramic-polymer composite thick films.
通过气溶胶沉积工艺在铜基板上沉积了两种类型的陶瓷-聚合物复合厚膜，并对其性能进行了研究，以制备具有可塑性优势、适用于集成基板的优化陶瓷基聚合物复合厚膜。当将具有不同机械性能的聚合物，如聚酰亚胺（PI）和聚甲基丙烯酸甲酯（PMMA），与α-Al2O3粉末一起用作起始粉末时，会形成两种具有不同特性的复合膜——表面形貌、沉积速率以及α-Al2O3的微晶尺寸。通过微维氏硬度测试结果证实，聚合物本身的机械性能与陶瓷-聚合物复合膜的性能相关。为了支持和解释这些结果，对两种类型的聚合物粉末在行星球磨后的微观结构进行了观察，并进行了额外的建模测试。结果表明，PMMA粉末因受到Al2O3粉末的冲击而发生变形，导致所得的Al2O3-PMMA复合膜中PMMA含量极少且沉积速率较低。相反，使用PI粉末时，由于PI颗粒的开裂，Al2O3-PI复合膜具有较高的沉积速率。因此，揭示了聚合物的机械性能对所得陶瓷-聚合物复合厚膜的性能有相当大的影响。
