Department of Electronic Materials Engineering, Kwangwoon University, 20 Kwangwoon-ro, Nowon-gu, Seoul 01897, Korea.
Department of Materials Science and Engineering, Pohang University of Science and Technology, 77 Cheongam-ro, Pohang 37673, Korea.
Sensors (Basel). 2022 Jul 11;22(14):5178. doi: 10.3390/s22145178.
A highly polarizable moisture sensor with multimodal sensing capabilities has great advantages for healthcare applications such as human respiration monitoring. We introduce an ionically polarizable moisture sensor based on NaCl/BaTiO composite films fabricated using a facile aerosol deposition (AD) process. The proposed sensing model operates based on an enormous NaCl ionization effect in addition to natural moisture polarization, whereas all previous sensors are based only on the latter. We obtained an optimal sensing performance in a 0.5 µm-thick layer containing NaCl-37.5 wt% by manipulating the sensing layer thickness and weight fraction of NaCl. The NaCl/BaTiO sensing layer exhibits outstanding sensitivity over a wide humidity range and a fast response/recovery time of 2/2 s; these results were obtained by performing the one-step AD process at room temperature without using any auxiliary methods. Further, we present a human respiration monitoring system using a sensing device that provides favorable and stable electrical signals under diverse respiratory scenarios.
一种具有多模态传感能力的高极化率湿度传感器在医疗保健应用中具有很大的优势，例如人体呼吸监测。我们介绍了一种基于 NaCl/BaTiO 复合薄膜的离子可极化湿度传感器，该传感器采用简单的气溶胶沉积（AD）工艺制造。所提出的传感模型基于巨大的 NaCl 离化效应以及自然水分极化，而以前的所有传感器仅基于后者。我们通过控制传感层厚度和 NaCl 的重量分数，在含有 37.5wt%NaCl 的 0.5 µm 厚的层中获得了最佳的传感性能。NaCl/BaTiO 传感层在很宽的湿度范围内表现出出色的灵敏度，响应/恢复时间快至 2/2 s；这些结果是通过在室温下进行一步 AD 工艺而无需使用任何辅助方法获得的。此外，我们提出了一种使用传感设备的人体呼吸监测系统，该系统在各种呼吸情况下提供良好且稳定的电信号。
