École Polytechnique Fédérale de Lausanne, Lausanne, Switzerland.
Biomed Microdevices. 2012 Oct;14(5):819-28. doi: 10.1007/s10544-012-9661-8.
This paper describes the development of a polyimide/SU-8 catheter-tip MEMS gauge pressure sensor. Finite element analysis was used to investigate critical parameters, impacting on the device design and sensing characteristics. The sensing element of the device was fabricated by polyimide-based micromachining on a flexible membrane, using embedded thin-film metallic wires as piezoresistive elements. A chamber containing this flexible membrane was sealed using an adapted SU-8 bonding technique. The device was evaluated experimentally and its overall performance compared with a commercial silicon-based pressure sensor. Furthermore, the device use was demonstrated by measuring blood pressure and heart rate in vivo.
本文描述了一种聚酰亚胺/SU-8 导管尖端 MEMS 表压传感器的研制。采用有限元分析研究了影响器件设计和传感特性的关键参数。该器件的传感元件是通过在柔性膜上进行聚酰亚胺基微机械加工，并使用嵌入式薄膜金属丝作为压阻元件来制造的。采用改进的 SU-8 键合技术对包含该柔性膜的腔室进行密封。对该器件进行了实验评估，并将其整体性能与商用硅基压力传感器进行了比较。此外，还通过在体测量血压和心率来展示了该器件的应用。
