de Haan Victor-Otto, Santbergen Rudi, Tijssen Martijn, Zeman Miro
BonPhysics B.V., Laan van Heemstede 38, 3297 AJ Puttershoek, The Netherlands.
Appl Opt. 2012 Jun 1;51(16):3109-13. doi: 10.1364/AO.51.003109.
Optical standing wave sensors have been manufactured by amorphous silicon deposition. The responses of these sensors, when subjected to standing waves, have been calculated and measured. It is shown that the responses are different depending on the way the standing wave is created. The responses also depend on the thickness and material properties of the layers used to create the sensors. Quantitative agreement between measurements and model calculations can be obtained by including alignment errors, incoherent light interaction and scaling factors. The simple construction of the sensors allows for a broad application range.
光学驻波传感器是通过非晶硅沉积制造的。已经计算并测量了这些传感器在受到驻波作用时的响应。结果表明，响应因驻波的产生方式而异。响应还取决于用于制造传感器的层的厚度和材料特性。通过考虑对准误差、非相干光相互作用和比例因子，可以实现测量与模型计算之间的定量一致性。传感器的简单结构使其具有广泛的应用范围。
