Ebnali-Heidari Majid, Mansouri Morteza, Mokhtarian Saeed, Moravvej-Farshi Mohammed Kazem
Faculty of Engineering, University of Shahrekord, Shahrekord 8818634141, Iran. ebnali‐
Appl Opt. 2012 Jun 1;51(16):3387-96. doi: 10.1364/AO.51.003387.
We present a numerical design procedure for an all-optical compact sensor by means of integrating the optofluidic switch polymer interferometers to measure the microfluidic air pressure and flow rate. The design is based on a flexible air gap optical cavity that can generate an interference pattern when illuminated by a monochromatic light. The optical interference pattern directly depends on the pressure. In our numerical simulations, we take the effects of fluid flow rate, solid deformation, and the light interference into account. We use the beam propagation method for simulating the optics and the finite element method for simulating the mechanics. The significance of the proposed sensor lies with its low power consumption, compactness, low cost, and short length. This sensor can operate under pressure range of 0-60±6% Pa at a constant temperature of 20 °C.
我们提出了一种全光紧凑型传感器的数值设计方法，该方法通过集成光流体开关聚合物干涉仪来测量微流体中的气压和流速。该设计基于一个灵活的气隙光学腔，当受到单色光照射时，该腔能够产生干涉图样。光学干涉图样直接取决于压力。在我们的数值模拟中，我们考虑了流体流速、固体变形和光干涉的影响。我们使用光束传播法来模拟光学部分，使用有限元法来模拟力学部分。所提出的传感器的重要意义在于其低功耗、紧凑性、低成本和短长度。该传感器在20°C的恒定温度下，可在0 - 60±6% Pa的压力范围内工作。
