Optics Laboratory, School of Engineering, Swiss Federal Institute of Technology Lausanne (EPFL), CH-1015 Lausanne, Switzerland.
Opt Lett. 2010 Nov 1;35(21):3604-6. doi: 10.1364/OL.35.003604.
We present a chip-scale optofluidic interferometric sensor for measuring liquid pressure based on an imaging method. The chip was constructed with a polymer by multilayer soft lithography. It consists of a flexible air gap optical cavity, which, upon illumination by monochromatic light, generates interference patterns that depend on pressure. The pressure was measured by imaging and analyzing the interference patterns. We also employed a pattern recognition algorithm that significantly simplified the calculation and enhanced the measurement reliability. This pressure sensor was demonstrated with a working range of 0-22 psi and an accuracy of ±1.4% of full scale when temperature stabilized.
我们提出了一种基于成像法的用于测量液体压力的片上光流体干涉传感器。该芯片由多层软光刻技术用聚合物制造而成。它由一个柔性空气隙光学腔组成，当用单色光照射时，会产生依赖于压力的干涉图案。通过对干涉图案进行成像和分析来测量压力。我们还采用了一种模式识别算法，该算法极大地简化了计算过程，提高了测量的可靠性。当温度稳定时，该压力传感器的工作范围为 0-22psi，满量程精度为±1.4%。
