用于医用内窥镜的压电扫描镜的机电性能
Electromechanical performance of piezoelectric scanning mirrors for medical endoscopy.
作者信息
Gilchrist Kristin H, Dausch David E, Grego Sonia
机构信息
Center for Materials and Electronic Technologies, RTI International, Research Triangle Park, NC, USA.
出版信息
Sens Actuators A Phys. 2012 May 1;178:193-201. doi: 10.1016/j.sna.2012.02.029.
The electromechanical performance of piezoelectric scanning mirrors for endoscopy imaging is presented. The devices are supported by a single actuating cantilever to achieve a high fill factor, the ratio of mirror area to the combined mirror and actuator area. The largest fill factor devices (74%) achieved 10° mechanical scan range at +/-10V with a 300 μm long cantilever. The largest angular displacement of 30° mechanical scan range was obtained with a 500 μm long cantilever device with a 63% fill factor driven at 40 Vpp. A systematic investigation of device performance (displacement and speed) as a function of fabrication and operational parameters including the stress balance in the cantilever revealed unexpectedly large displacements with lack of inversion at the coercive field. An interpretation of the results is presented based on piezoelectric film domain orientation and clamping with supporting piezoelectric film characterization measurements.
介绍了用于内窥镜成像的压电扫描镜的机电性能。这些器件由单个驱动悬臂支撑，以实现高填充因子，即镜面面积与镜面和致动器组合面积的比率。最大填充因子的器件（74%）在±10V电压下，使用300μm长的悬臂实现了10°的机械扫描范围。在40Vpp驱动下，使用填充因子为63%、500μm长的悬臂器件获得了30°机械扫描范围的最大角位移。对器件性能（位移和速度）作为制造和操作参数（包括悬臂中的应力平衡）的函数进行了系统研究，结果显示在 coercive 场下缺乏反转时出现了意外的大位移。基于压电薄膜畴取向和用支撑压电薄膜表征测量进行的夹持，对结果进行了解释。
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