Instituto de Microlectrónica de Madrid-IMM, CSIC, Isaac Newton 8-PTM, Tres Cantos, 28760 Madrid, Spain.
Nanotechnology. 2012 Aug 10;23(31):315501. doi: 10.1088/0957-4484/23/31/315501. Epub 2012 Jul 13.
There is a need for noninvasive techniques for simultaneous imaging of the stress and vibration mode shapes of nanomechanical systems in the fields of scanning probe microscopy, nanomechanical biological and chemical sensors and the semiconductor industry. Here we show a novel technique that combines a scanning laser, the beam deflection method and digital multifrequency excitation and analysis for simultaneous imaging of the static out-of-plane displacement and the shape of five vibration modes of nanomechanical systems. The out-of-plane resolution is at least 100 pm Hz⁻¹/² and the lateral resolution, which is determined by the laser spot size, is 1-1.5 μm. The capability of the technique is demonstrated by imaging the residual surface stress of a microcantilever together with the shape of the first 22 vibration modes. The vibration behavior is compared with rigorous finite element simulations. The technique is suitable for major improvements in the imaging of liquids, such as higher bandwidth and enhanced spatial resolution.
需要非侵入式技术来同时对扫描探针显微镜、纳米机械生物和化学传感器以及半导体工业领域中的纳米机械系统的应力和振动模态形状进行成像。这里我们展示了一种新颖的技术，它结合了扫描激光、光束偏转方法和数字多频激励和分析，用于同时对纳米机械系统的静态面外位移和五个振动模式的形状进行成像。面外分辨率至少为 100 pm Hz⁻¹/²，横向分辨率由激光光斑尺寸决定，为 1-1.5 μm。该技术通过成像微悬臂梁的残余表面应力以及前 22 个振动模式的形状来证明其性能。振动行为与严格的有限元模拟进行了比较。该技术适用于液体成像的重大改进，例如更高的带宽和增强的空间分辨率。
