Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA.
Microsc Microanal. 2012 Aug;18(4):699-704. doi: 10.1017/S1431927612001237.
The resolution of conventional electron microscopes is usually limited by spherical aberration. Microscopes equipped with aberration correctors are then primarily limited by higher order, chromatic, and misalignment aberrations. In particular the Nion third-order aberration correctors installed on machines with a low energy spread and possessing sophisticated alignment software were limited by the uncorrected fifth-order aberrations. Here we show how the Nion fifth-order aberration corrector can be used to adjust and reduce some of the fourth- and fifth-order aberrations in a probe-corrected scanning transmission electron microscope.
传统电子显微镜的分辨率通常受到球差的限制。配备像差校正器的显微镜则主要受到高阶像差、色差和失准像差的限制。特别是在低能散度且配备复杂对齐软件的机器上安装的 Nion 三阶像差校正器受到未校正的五阶像差的限制。在这里，我们展示了如何使用 Nion 五阶像差校正器来调整和减少探针校正扫描透射电子显微镜中的一些四阶和五阶像差。
