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用于单色仪和像差校正器的维恩滤波器的三阶像差理论。

Third-order aberration theory of Wien filters for monochromators and aberration correctors.

作者信息

Tsuno K, Ioanoviciu D, Martínez G

机构信息

JEOL Ltd, 1-2, Musashino 3-chome, Akishima, Tokyo 196-8558, Japan.

出版信息

J Microsc. 2005 Mar;217(Pt 3):205-15. doi: 10.1111/j.1365-2818.2005.01443.x.

DOI:10.1111/j.1365-2818.2005.01443.x
PMID:15725124
Abstract

Third-order aberrations at the first and the second focus planes of double focus Wien filters are derived in terms of the following electric and magnetic field components--dipole: E1, B1; quadrupole: E2, B2; hexapole: E3, B3 and octupole: E4, B4. The aberration coefficients are expressed under the second-order geometrical aberration free conditions of E2 = -(m + 2)E1/8R, B2 = -mB1/8R and E3R2/E1 - B3R2/B1 = m/16, where m is an arbitrary value common to all equations. Aberration figures under the conditions of zero x- and y-axes values show very small probe size and similar patterns to those obtained using a previous numerical simulation [G. Martinez & K. Tsuno (2004) Ultramicroscopy, 100, 105-114]. Round beam conditions are obtained when B3 = 5m2B1/144R2 and (E4/E1 - B4/B1)R3 = -29m2/1152. In this special case, aberration figures contain only chromatic and aperture aberrations at the second focus. The chromatic aberrations become zero when m = 2 and aperture aberrations become zero when m = 1.101 and 10.899 at the second focus. Negative chromatic aberrations are obtained when m < 2 and negative aperture aberrations for m < 1.101. The Wien filter functions not only as a monochromator but also as a corrector of both chromatic and aperture aberrations. There are two advantages in using a Wien filter aberration corrector. First, there is the simplicity that derives from it being a single component aberration correction system. Secondly, the aberration in the off-axis region varies very little from the on-axis figures. These characteristics make the corrector very easy to operate.

摘要

根据以下电场和磁场分量——偶极子:E1、B1;四极子:E2、B2;六极子:E3、B3;以及八极子:E4、B4,推导了双聚焦维恩滤波器第一和第二焦平面处的三阶像差。像差系数是在E2 = -(m + 2)E1/8R、B2 = -mB1/8R以及E3R2/E1 - B3R2/B1 = m/16的二阶几何像差为零的条件下表示的,其中m是所有方程共有的任意值。在x轴和y轴值为零的条件下的像差图显示出非常小的探针尺寸,并且与使用先前数值模拟[G. Martinez & K. Tsuno (2004) Ultramicroscopy, 100, 105 - 114]获得的图案相似。当B3 = 5m2B1/144R2且(E4/E1 - B4/B1)R3 = -29m2/1152时,可获得圆形束条件。在这种特殊情况下,像差图在第二焦点处仅包含色差和孔径像差。当m = 2时色差变为零,当m = 1.101和10.899时在第二焦点处孔径像差变为零。当m < 2时获得负色差,当m < 1.101时获得负孔径像差。维恩滤波器不仅起单色仪的作用,还起色差和孔径像差校正器的作用。使用维恩滤波器像差校正器有两个优点。首先,其简单性源于它是一个单组件像差校正系统。其次,离轴区域的像差与轴上图形的差异非常小。这些特性使得校正器非常易于操作。

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