Delft University of Technology, Department of Applied Physics, Charged Particle Optics Group, Lorentzweg 1, 2628CJ Delft, The Netherlands.
Ultramicroscopy. 2010 Oct;110(11):1411-9. doi: 10.1016/j.ultramic.2010.07.012. Epub 2010 Aug 4.
The low-voltage foil corrector is a novel type of foil aberration corrector that can correct for both the spherical and chromatic aberration simultaneously. In order to give a realistic example of the capabilities of this corrector, a design for a low-voltage scanning electron microscope with the low-voltage foil corrector is presented. A fully electrostatic column has been designed and characterised by using aberration integrals and ray tracing calculations. The amount of aberration correction can be adjusted relatively easy. The third order spherical and the first order chromatic aberration can be completely cancelled. In the zero current limit, a FW50 probe size of 1.0 nm at 1 kV can be obtained. This probe size is mainly limited by diffraction and by the fifth order spherical aberration.
低压箔片校正器是一种新型的箔片像差校正器，能够同时校正球差和色差。为了给出该校正器性能的实际示例，提出了一种带有低压箔片校正器的低压扫描电子显微镜的设计。使用像差积分和光线追踪计算对全静电柱进行了设计和特性描述。可以相对容易地调整像差校正的量。三阶球差和一阶色差可以完全消除。在零电流极限下，在 1kV 时可以获得 1.0nm 的 FW50 探头尺寸。该探头尺寸主要受到衍射和五阶球差的限制。
