Stemmer A, Engel A
M.E. Müller Institute for High Resolution Electron Microscopy, University of Basel, Switzerland.
Ultramicroscopy. 1990 Dec;34(3):129-40. doi: 10.1016/0304-3991(90)90067-v.
Methods are discussed which permit the calibration of x-, y-, z-sensitivities, non-linearities and frequency responses of the scanning device of a scanning tunneling microscope (STM) either by interferometry or directly from STM topographs. A technique is presented to measure the frequency response of the complete STM feedback unit and to derive a maximum speed in z direction which allows one to estimate the maximum scanning speed still permitting one to track surface corrugations. The signal transfer characteristics of a STM are evaluated in a direct comparison with high resolution transmission electron microscopy on an identical specimen area. The various effects of contaminants between tip and specimen and the finite tip radius receive special attention.
讨论了通过干涉测量法或直接从扫描隧道显微镜（STM）的地形图校准STM扫描装置的x、y、z灵敏度、非线性和频率响应的方法。提出了一种测量完整STM反馈单元频率响应并得出z方向最大速度的技术，该速度可用于估计仍能跟踪表面波纹的最大扫描速度。在相同的样品区域上，通过与高分辨率透射电子显微镜直接比较，评估了STM的信号传输特性。特别关注了针尖与样品之间污染物的各种影响以及有限的针尖半径。
