National Creative Research Center for Block Copolymer Self-Assembly, Department of Chemical Engineering, Pohang University of Science and Technology, Kyungbuk 790-784, Korea.
ACS Nano. 2012 Sep 25;6(9):7966-72. doi: 10.1021/nn3025089. Epub 2012 Aug 24.
Highly asymmetric lamellar microdomains, such as those required for many lithographic line patterns, cannot be straightforwardly achieved by conventional block copolymer self-assembly. We present a conceptually new and versatile approach to produce highly asymmetric lamellar morphologies by the use of binary blends of block copolymers whose components are capable of hydrogen bonding. We first demonstrate our strategy in bulk systems and complement the experimental results observed by transmission electron microscopy and small-angle X-ray scattering with theoretical calculations based on strong stretching theory to suggest the generality of the strategy. To illustrate the impact on potential lithographic applications, we demonstrate that our strategy can be transferred to thin film morphologies. For this purpose, we used solvent vapor annealing to prepare thin films with vertically oriented asymmetric lamellar patterns that preserve the bulk morphological characteristics. Due to the highly asymmetric lamellar microdomains, the line width is reduced to sub-10 nm scale, while its periodicity is precisely tuned.
高度各向异性的层状微区,如许多光刻线条图案所需要的层状微区,不能通过传统的嵌段共聚物自组装直接实现。我们提出了一种新概念且通用的方法,通过使用能够形成氢键的嵌段共聚物的二元共混物来制备高度各向异性的层状形态。我们首先在本体体系中证明了我们的策略,并通过透射电子显微镜和小角 X 射线散射实验观察结果,结合基于强拉伸理论的理论计算来补充实验结果,以证明该策略的普遍性。为了说明其对潜在光刻应用的影响,我们证明了我们的策略可以转移到薄膜形态。为此,我们使用溶剂蒸气退火来制备具有垂直取向的不对称层状图案的薄膜,这些图案保留了本体的形态特征。由于具有高度各向异性的层状微区,线宽减小到亚 10nm 尺度,同时其周期性可以精确调节。