National Creative Research Center for Block Copolymer Self-Assembly, Department of Chemical Engineering, Pohang University of Science and Technology, Kyungbuk, 790-784, Korea.
Nat Commun. 2017 Nov 24;8(1):1765. doi: 10.1038/s41467-017-02019-9.
Block copolymers with various nanodomains, such as spheres, cylinders, and lamellae, have received attention for their applicability to nanolithography. However, those microdomains are determined by the volume fraction of one block. Meanwhile, nanopatterns with multiple shapes are required for the next-generation nanolithography. Although various methods have been reported to achieve dual nanopatterns, all the methods need sophisticated processes using E-beam. Here, we synthesized a miktoarm block copolymer capable of cleavage of one block by ultraviolet. Original cylindrical nanodomains of synthesized block copolymer were successfully transformed to lamellar nanodomains due to the change of molecular architecture by ultraviolet. We fabricated dual nanopatterns consisting of dots and lines at desired regions on a single substrate. We also prepared dual nanopatterns utilizing another phase transformation from spheres to cylinders in a block copolymer with higher interaction parameter. Since our concept has versatility to any block copolymer, it could be employed as next-generation nanolithography.
具有各种纳米域的嵌段共聚物，如球体、圆柱和层状，因其在纳米光刻中的适用性而受到关注。然而，这些微域是由一个嵌段的体积分数决定的。同时，下一代纳米光刻需要具有多种形状的纳米图案。尽管已经报道了各种方法来实现双纳米图案，但所有方法都需要使用电子束的复杂工艺。在这里，我们合成了一种可以通过紫外线裂解一个嵌段的杂臂嵌段共聚物。由于紫外线引起的分子结构变化，合成嵌段共聚物的原始圆柱纳米域成功转化为层状纳米域。我们在单个基板的期望区域上制造了由点和线组成的双纳米图案。我们还利用具有更高相互作用参数的嵌段共聚物从球体到圆柱的另一个相转变来制备双纳米图案。由于我们的概念对任何嵌段共聚物都具有通用性，因此它可以用作下一代纳米光刻。
