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温度对 Sio2/Su-8 多导层沿 St-90°X 石英上 Love 波传播特性的影响。

Temperature effects on the propagation characteristics of Love waves along multi-guide layers of Sio2/Su-8 on St-90°X quartz.

机构信息

Zhejiang University of Media and Communications, Hangzhou 310018, China.

出版信息

Sensors (Basel). 2012;12(6):7337-49. doi: 10.3390/s120607337. Epub 2012 May 30.

DOI:10.3390/s120607337
PMID:22969349
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC3435978/
Abstract

Theoretical calculations have been performed on the temperature effects on the propagation characteristics of Love waves in layered structures by solving the coupled electromechanical field equations, and the optimal design parameters were extracted for temperature stability improvement. Based on the theoretical analysis, excellent temperature coefficient of frequency (Tcf) of the fabricated Love wave devices with guide layers of SU-8/SiO(2) on ST-90°X quartz substrate is evaluated experimentally as only 2.16 ppm.

摘要

通过求解耦合的机电场方程，对温度对层状结构中 Love 波传播特性的影响进行了理论计算，并提取了用于提高温度稳定性的最佳设计参数。基于理论分析，实验评估了具有 SU-8/SiO(2) 导层的 Love 波器件在 ST-90°X 石英衬底上的出色频率温度系数（Tcf）仅为 2.16 ppm。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/801e/3435978/34b20b4baac2/sensors-12-07337f10.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/801e/3435978/9352286124d2/sensors-12-07337f1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/801e/3435978/91a6f706bc4a/sensors-12-07337f2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/801e/3435978/afdf7ee699be/sensors-12-07337f3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/801e/3435978/0c073def5d2e/sensors-12-07337f4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/801e/3435978/b363ccfe4d72/sensors-12-07337f5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/801e/3435978/95d023816013/sensors-12-07337f6.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/801e/3435978/e1336e354c2d/sensors-12-07337f7.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/801e/3435978/293a2ff8f4ab/sensors-12-07337f8.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/801e/3435978/aff80af062cd/sensors-12-07337f9.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/801e/3435978/34b20b4baac2/sensors-12-07337f10.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/801e/3435978/9352286124d2/sensors-12-07337f1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/801e/3435978/91a6f706bc4a/sensors-12-07337f2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/801e/3435978/afdf7ee699be/sensors-12-07337f3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/801e/3435978/0c073def5d2e/sensors-12-07337f4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/801e/3435978/b363ccfe4d72/sensors-12-07337f5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/801e/3435978/95d023816013/sensors-12-07337f6.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/801e/3435978/e1336e354c2d/sensors-12-07337f7.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/801e/3435978/293a2ff8f4ab/sensors-12-07337f8.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/801e/3435978/aff80af062cd/sensors-12-07337f9.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/801e/3435978/34b20b4baac2/sensors-12-07337f10.jpg

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本文引用的文献

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