Michman Elisheva, Oded Meirav, Shenhar Roy
Institute of Chemistry and the Center for Nanoscience and Nanotechnology, The Hebrew University of Jerusalem, Jerusalem 9190401, Israel.
Polymers (Basel). 2022 Jun 12;14(12):2377. doi: 10.3390/polym14122377.
The ability to create mixed morphologies using easily controlled parameters is crucial for the integration of block copolymers in advanced technologies. We have previously shown that casting an ultrathin block copolymer film on a topographically patterned substrate results in different deposited thicknesses on the plateaus and in the trenches, which leads to the co-existence of two patterns. In this work, we highlight the dependence of the dual patterns on the film profile. We suggest that the steepness of the film profile formed across the plateau edge affects the nucleation of microphase-separated domains near the plateau edges, which influences the morphology that develops on the plateau regions. An analysis of the local film thicknesses in multiple samples exhibiting various combinations of plateau and trench widths for different trench depths enabled the construction of phase diagrams, which unraveled the intricate dependence of the formed patterns not only on the curvature of the film profile but also on the fraction of the film that resides in the trenches. Our analysis facilitates the prediction of the patterns that would develop in the trenches and on the plateaus for a given block copolymer film of known thickness from the dimensions of the topographic features.
利用易于控制的参数来创建混合形态的能力对于将嵌段共聚物集成到先进技术中至关重要。我们之前已经表明,在具有拓扑图案的基板上浇铸超薄嵌段共聚物薄膜会导致在平台和沟槽上有不同的沉积厚度,这会导致两种图案共存。在这项工作中,我们强调了双重图案对薄膜轮廓的依赖性。我们认为,横跨平台边缘形成的薄膜轮廓的陡度会影响平台边缘附近微相分离域的成核,这会影响在平台区域形成的形态。对多个样品的局部薄膜厚度进行分析,这些样品展示了不同沟槽深度下平台和沟槽宽度的各种组合,从而构建了相图,该相图揭示了所形成图案的复杂依赖性,不仅取决于薄膜轮廓的曲率,还取决于位于沟槽中的薄膜部分。我们的分析有助于根据地形特征的尺寸预测已知厚度的给定嵌段共聚物薄膜在沟槽和平台上会形成的图案。